Compared with spring wheat, maize and sunflower sole cropping, soil moisture in 0-120 cm soil depth of spring wheat/maize and spring wheat/sunflower intercropping during annual crop growth periods and crops yields were determined in Hetao irrigation district, Inner Mongolia Autonomous Region. The results showed that the seasonal changes of soil moisture evapotranspiration intensity of spring wheat/maize, spring wheat/sunflower intercropping were bimodal curve, while spring wheat, maize and sunflower sole cropping were unimodal curve, and the soil moisture evapotranspiration amounts of intercropping patterns were higher than sole cropping patterns. The crop yields and land equivalent ratio of intercropping patterns were higher than sole cropping patterns, but intercropping patterns reduced soil water use efficiency and water equivalence ratio, reduced irrigation use efficiency and irrigation water equivalence ratio in crop growth periods and annual crop growth periods. In order to improve soil water use efficiency, the intercropping area should be reduced, or intercropping crops should be segregated with a bank, and crops should be irrigated respectively according to the different water requirement.